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Press Release

The 3D Metrology Congress includes

“Characterization of wavefront phase sensors” by Wooptix


Wooptix, participates this week at the prestigious 3D Metrology Event. The 3DMC is now celebrating its 8th Edition in Bilbao. The organization of the event communicates the the 3DMC celebration in the Basque Country. “For our 8th event we will be working with our partners IDEKO and Tekniker who are inviting us to use their excellent facilities and to explore the Basque metropolis of Bilbao. Their facilities offer a first-class venue for presentations, discussions and demonstrations as well as an opportunity to tour their state-of-the-art labs and shop floors. In addition, Bilbao will ensure a memorable ice breaking event”.

The program had an Ice Breaking session on Tuesday the 26th, where the presentation of Scientific Posters took place. During this Session, Wooptix presented “Characterization of wavefront phase sensors by using a piezoelectric deformable mirror with nanometric steps”.

Poster Abstract

The abstract says: “The characterization process of a Wavefront sensing (WFS) device is not standardized; there are many factors that affect the feasibility of the process. We propose a well-defined procedure to estimate the behavior of the WFS by using a piezoelectric deformable mirror (DM)”.

And it continues: “Several factors depend on the sensor configuration, such as wavelength, sensitivity, accuracy, precision, and dynamic range. This study demonstrates how to utilize the steps of deformable mirrors to characterize different WFS and estimate the standard deviation of the materials under study, in this case, the DM variability. This approach enables standard users to define the correct WFS for each use case and allows characterizing subsequent elements by understanding the potential deflections caused by the WFS”

Characterization of wavefront phase sensors
               3DMC Poster

Study Conclussions

The study “Characterization of wavefront phase sensors by using a piezoelectric deformable mirror with nanometric steps” illustrates the testing process for different wavefront sensors, allowing to assess the metrics under consistent conditions.

  • To evaluate the sensors adaptability to a range of use cases, is essential to include detailed test specifications within the documentation.
  • Both sensors were successfully characterized reaching in the Wooptix camera case a 25 nm accuracy and 9 nm precision, and 34 nm accuracy and 15 nm repeatability

Download the Poster

You can download the poster. Download the Poster Characterization of wavefront phase sensors

About Wooptix

Wooptix is a leader in semiconductor metrology through wavefront phase imaging, a technique derived from adaptive optics research in astronomy. With a multidisciplinary team, Wooptix aims to disrupt the semiconductor metrology industry with the highest lateral resolution and fastest measurement technique for inline fab measurements.

The company has developed Phemet®, a wafer shape lab tool for blank and patterned wafers, ahead of the upcoming fully automated fab tool, expected in 2024. Wooptix has already deployed Phemet® at several customer sites worldwide.

Wooptix is based at Tenerife, Madrid (Spain) and San Francisco (USA).

Further Information

[email protected]