Juan Manuel Trujillo-Sevilla, José Manuel Rodríguez-Ramos, Jan Olaf Gaudestad
In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wave Front Phase Imaging (WFPI) has high lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a single image snapshot of the entire wafer.
Sergio Bonaque, Juan Manuel Trujillo, Oscar Casanova, David Carmona, Miguel Sicilia, Sabato Ceruso, Jan Gaudestad, José Manuel Rodríguez-Ramos
We present a new wave front sensing technique based on detecting the propagating light waves. This allows the user to acquire millions of data points within the pupil of the human eye; a resolution several orders of magnitude higher than current industry standard ophthalmic devices.
Juan Manuel Trujillo-Sevilla, Jose Manuel Ramos-Rodríguez, Jan Gaudestad
Wavefront phase imaging (WFPI) is a new technique to measure wafer geometry on a full wafer in a single image snapshot providing depth information for every pixel. The number of topography data points for the entire wafer will be proportional to the number of pixels in the image sensor, allowing for millions of data points to be acquired in less than a second.
Wave front phase imaging of wafer geometry using high pass filtering to reveal nanotopography / January 2020
Juan Manuel Trujillo, Jose Manuel Ramos-Rodríguez, Jan Gaudestad
In this paper we show that Wave Front Phase Imaging (WFPI) has high lateral resolution and high sensitivity enabling it to measure nanotopography and roughness on a silicon wafer by simply acquiring a single image of the entire wafer. WFPI is achieved by measuring the reflected light intensity from monochromatic…
Óscar Gómez, Ricardo Oliva, Gabriel A. Rodríguez, José G. Marichal
Discrete Radon Transform, DRT, is an integral transform that computes the complete set, in terms of slope and intercepts, of line integrals through a two-dimensional domain. It exhibits linearithmic computational complexity and avoids the usage of real numbers thanks to a divide and conquer, or multiscale, approach with a loose definition of discrete lines.
José Manuel Rodríguez-Ramos, Alex Roqué, David Carmona, Jan Gaudestad
We will discuss here the applications of the Wavefront Phase Imaging sensor (WFPI) on Adaptive Optics (AO) for Astronomy. The WFPI sensor is based on registering the intensity distribution at two different optical planes by a conventional imaging sensor. In the geometrical approximation, the light can be considered as a collection of light rays which bends according to Snellen’s law.
Wave Front Phase Imaging of Wafer Geometry Using High Pass Filtering for Improved Resolution / October 2019
José Manuel Rodríguez-Ramos, Jan Gaudestad, Juan Manuel Trujillo
In this paper we show that Wave Front Phase Imaging (WFPI) has good enough lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a simple image of the entire wafer. WFPI is achieved by measuring the reflected light intensity from monochromatic uncoherent light at two different planes along the optical path with the same field of view.
Miriam Velasco, Sergio Bonaque, Juan Manuel Trujillo, Jose Manuel Rodríguez Ramos
In this work we present a new method for optical characterization of glass samples. It is based on a new wavefront sensor method developed by the image processing specialist company Wooptix. With this novel wavefront phase sensor and a simple optical arrangement we have performed an objective optical characterization of glass specimens…