Wooptix presents its latest data on WFPI at SPIE Photonics West in San Francisco
Wooptix will present its latest data on WFPI (Wave Front Phase Imaging) in San Francisco on January 30. Titled “Repeatability Study of Silicon Wafer Shape Measurements”, the presentation will take place at Moscone Center, Room 312 (Level 3 South), at 2:10 pm.
The presentation will take place during SPIE Photonics West, announced as “the world’s premier event for lasers, biomedical optics and biophotonic technologies, quantum, and optoelectronics”
Regarding Wooptix’s presentation, Jan Olaf states, VP Business Development says “We present WFPI as a new technique with high resolution and high data count acquired at very high-speed using a system where the wafer is free from the effects of gravity and with a very high repeatability as measured according to the Semi standards M49“.
Wave Front Phase Imaging (WFPI)
Wooptix introduces Wave Front Phase Imaging (WFPI), a new wafer geometry technique that acquires 16.3 million data points in 12 seconds on a complete 300 mm wafer, providing a lateral resolution of 65 μm while keeping the wafer vertical.
It’s crucial to note that for a wafer shape system to function in a high-volume manufacturing environment, repeatability is a critical measure that must be tested. “Advanced lithographic patterning processes require a detailed map of the wafer’s free and non-gravitational shape to avoid overlay errors caused by depth of focus issues,” continues Jan Olaf.
“The flatness of the silicon wafers used to manufacture integrated circuits (ICs) is controlled with strict tolerances to ensure that the entire wafer is flat enough for lithographic processing,” concludes Jan Olaf.
You can find more information Here
SPIE Photonics West
Within SPIE Photonics, the following highlighted technologies can be found:
• Lasers and peripherals
• Beam conditioning and steering components
• Beam measurement and profiling instrumentation
• Cameras and CCD components
• Fiber optic components, equipment, and systems
• Optical components and hardware
• Optical communications
• Optical detectors
• High-speed imaging and sensors
• Optical materials and substrates
• Infrared sources and detectors
• Electronic imaging components
• Optical coatings
• Lenses and filters
• Positioning systems and mounts
• Metrology and testing equipment
• Software for design and simulation
SPIE Photonics West will take place at Moscone Center, San Francisco. If you are interested in acquiring a ticket, you can do so by clicking Here
Wooptix is a leader in semiconductor metrology using wave front phase imaging, a technique derived from adaptive optics research in astronomy. With a multidisciplinary team, Wooptix aims to revolutionize the semiconductor metrology industry with the highest lateral resolution and fastest measurement technique for online factory measurements.
The company has developed Phemet®, a silicon wafer measurement tool, which is the precursor to the next fully automated manufacturing tool expected in 2024. Wooptix has already implemented Phemet® at various customer sites worldwide.
Wooptix is headquartered in Tenerife, Madrid (Spain), and San Francisco (USA).