Wafer Shape
// wafer distortion predictions
Measuring free-form wafer shape To enable
Wooptix has introduced a new methodology for free-form wafer-shape measurements: Wave Front Phase Imaging (WFPI).
This technique has been evaluated on dedicated test wafers and the measurement results reveal the expected local wafer-shape changes due to wafer processing.
One potential application of free-form wafer-shape measurements is the prediction of dense distortion maps, which requires that the free-form wafer-shape measurements are sufficiently accurate.
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