Wafer Shape

Wooptix has introduced a new methodology for free-form wafer-shape measurements: Wave Front Phase Imaging (WFPI).

This technique has been evaluated on dedicated test wafers and the measurement results reveal the expected local wafer-shape changes due to wafer processing.

One potential application of free-form wafer-shape measurements is the prediction of dense distortion maps, which requires that the free-form wafer-shape measurements are sufficiently accurate.