Nanotopography Blank Wafer Geometry
Nanotopography:
Blank wafer geometry
Utilizing a distinctive vertical wafer grip, PHEMET metrology system offer comprehensive measurement of both front and back wafer surfaces simultaneously, eliminating the impact of gravitational distortion.
Phemet® offers a singular measurement yields a range of wafer metrics, including:
- Warp and bow
- In-plane displacement
- Stress-induced local curvature
- Variation in wafer thickness and flatness
- Nanotopography (NT) of both front and back surfaces
- Wafer edge roll-off (ERO)
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