PHEMET® White Paper
Revolutionizing Semiconductor Metrology with Cutting-Edge Precision and Efficiency
Phemet® works thanks to the WFPI technique developed by Wooptix. This technique analyzes the intensity of the light distribution reflected by the silicon wafer in two conjugated planes. These planes allow us to get data from both sides of the wafer and compare the position of light to build a topographic map of its surface.
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