Ricardo Oliva-García, Sabato Ceruso, José G. Marichal-Hernández and José M. Rodriguez-Ramos
This work introduces a real-time full-resolution depth estimation device, which allows integral displays to be fed with a real-time light-field. The core principle of the technique is a high-speed focal stack acquisition method combined with an efficient implementation of the depth estimation algorithm, …
Juan Trujillo, Álvaro Pérez, Óscar Casanova, Miriam Velasco, Sabato Ceruso, Ricardo Oliva, Óscar Gómez, Javier Martín, Alex Roqué, José Manuel Rodríguez, Jan O. Gaudestad
Wave Front Phase Imaging (WFPI), a new wafer geometry technique, is presented, that acquires 7.65 million data points in 5 seconds on a full 300mm wafer providing lateral resolution of 96µm.
T·EYEDE TEAM
In this work, we characterize the in vivo ocular optics of the human eye with a lateral resolution of 8.6 microns, which implies roughly 1 million measurement points for a pupil diameter of 9 mm.
Wooptix’ team with the collaboration of Damien Gatinel & Jack T. Holladay
In this work, we characterize the in vivo ocular optics of the human eye with a lateral resolution of 8.6 microns, which implies roughly 1 million measurement points for a pupil diameter of 9 mm. The results suggest that the normal human eye presents a series of hitherto unknown optical patterns. This discovery could have a great impact on the way we understand some fundamental mechanisms of human vision.
Juan M. Trujillo-Sevilla, Oscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Alvaro Pérez-García, José Manuel Rodríguez-Ramos, Jan O. Gaudestad
Wave Front Phase Imaging (WFPI) is used to measure the stria on an artificial, transparent plate made of Schott N-BK7® glass material by accurately measuring the Optical Path Difference (OPD) map. WFPI is a new technique capable of reconstructing an accurate high resolution wave front phase map by capturing two intensity images at different propagation distances. An incoherent light source generated by a light emitting diode (LED) is collimated and transmitted through the sample…
Álvaro Pérez-García, Juan M. Trujillo-Sevilla, Óscar Casanova-González, Miriam Velasco- Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Álvaro Pérez-García, Jose Manuel Ramos-Rodríguez, Jan O. Gaudestad
The flatness of the silicon wafers used to manufacture integrated circuits (IC) is controlled to tight tolerances to help ensure that the full wafer is sufficiently flat for lithographic processing. Advanced lithographic patterning processes require a detailed map of the wafer shape to avoid overlay errors caused by depth-of-focus issues1. A large variety of new materials are being introduced in Back-End of Lines (BEOL) to ensure innovative architecture for new applications. The standard in-line control plan for the BEOL layer deposition steps is based on film thickness and global stress measurements which can be performed on blanket wafers to check the process equipment performance. However, the challenge remains to ensure high performance…
WOOPTIX TEAM
The Radon transform is a valuable tool in inverse problems such as the ones present in electromagnetic imaging.
Sabato Ceruso, Sergio Bonaque-González, Ricardo Oliva-García, José Manuel Rodríguez-Ramos
The problem of reconstructing a depth map from a sequence of differently focused images (focal stack) is called Depth from focus. The core idea of this method is to analyze the sharpness of each pixel and compare it along the axis of the focal stack to estimate the true depth value. This approach has two main drawbacks: it depends on the optics of the camera and on the focus measure operator…
José G. Marichal-Hernández, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Iván Rodríguez-Méndez, José M. Rodríguez-Ramos
The Radon transform is a valuable tool in inverse problems such as the ones present in electromagnetic imaging. Up to now the inversion of the multiscale discrete Radon transform has been only possible by iterative numerical methods while the continuous Radon transform is usually tackled…
Juan Manuel Trujillo-Sevilla, José Manuel Rodríguez-Ramos, Jan Olaf Gaudestad
In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wave Front Phase Imaging (WFPI) has high lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a single image snapshot of the entire wafer.