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Papers

Roughness Measurement of a Silicon Wafer Using Wave Front Phase Imaging / August 2020

Juan Manuel Trujillo-Sevilla, José Manuel Rodríguez-Ramos, Jan Olaf Gaudestad

In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wave Front Phase Imaging (WFPI) has high lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a single image snapshot of the entire wafer.