JAN OLAF GAUDESTAD
New technology is required by the semiconductor industry. We present a technology that is faster than any existing fab metrology systems and meets both the demands.
Juan Manuel Trujillo-Sevilla, José Manuel Rodríguez-Ramos, Jan Olaf Gaudestad
In this paper we introduce a new metrology technique for measuring wafer geometry on silicon wafers. Wave Front Phase Imaging (WFPI) has high lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a single image snapshot of the entire wafer.
Light field technology developer Wooptix® is partnering with optical component developer poLight® to enable a significant advancement in the capabilities of light field-based camera systems suitable for portable device such as smartphones, laptops, tablets, wearables and more.