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Papers

Wavefront phase imaging for global and local wafer geometry / February 2020

Juan Manuel Trujillo-Sevilla, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Wavefront phase imaging (WFPI) is a new technique to measure wafer geometry on a full wafer in a single image snapshot providing depth information for every pixel. The number of topography data points for the entire wafer will be proportional to the number of pixels in the image sensor, allowing for millions of data points to be acquired in less than a second.

Papers

Wave front phase imaging of wafer geometry using high pass filtering to reveal nanotopography / January 2020

Juan Manuel Trujillo, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

In this paper we show that Wave Front Phase Imaging (WFPI) has high lateral resolution and high sensitivity enabling it to measure nanotopography and roughness on a silicon wafer by simply acquiring a single image of the entire wafer. WFPI is achieved by measuring the reflected light intensity from monochromatic…

Papers

Exposing parallelism of discrete radon transform / November 2019

Óscar Gómez, Ricardo Oliva, Gabriel A. Rodríguez, José G. Marichal

Discrete Radon Transform, DRT, is an integral transform that computes the complete set, in terms of slope and intercepts, of line integrals through a two-dimensional domain. It exhibits linearithmic computational complexity and avoids the usage of real numbers thanks to a divide and conquer, or multiscale, approach with a loose definition of discrete lines.

Papers

Wavefront Phase Imaging sensor (WFPI) / October 2019

José Manuel Rodríguez-Ramos, Alex Roqué, David Carmona, Jan Gaudestad

We will discuss here the applications of the Wavefront Phase Imaging sensor (WFPI) on Adaptive Optics (AO) for Astronomy. The WFPI sensor is based on registering the intensity distribution at two different optical planes by a conventional imaging sensor. In the geometrical approximation, the light can be considered as a collection of light rays which bends according to Snellen’s law.

Papers

Wave Front Phase Imaging of Wafer Geometry Using High Pass Filtering for Improved Resolution / October 2019

José Manuel Rodríguez-Ramos, Jan Gaudestad, Juan Manuel Trujillo

In this paper we show that Wave Front Phase Imaging (WFPI) has good enough lateral resolution and is sensitive enough to measure roughness on a silicon wafer by simply acquiring a simple image of the entire wafer. WFPI is achieved by measuring the reflected light intensity from monochromatic uncoherent light at two different planes along the optical path with the same field of view.

Papers

Novel wavefront phase sensor as objective glass quality inspector / September 2019

Miriam Velasco, Sergio Bonaque, Juan Manuel Trujillo, Jose Manuel Rodríguez Ramos

In this work we present a new method for optical characterization of glass samples. It is based on a new wavefront sensor method developed by the image processing specialist company Wooptix. With this novel wavefront phase sensor and a simple optical arrangement we have performed an objective optical characterization of glass specimens…

Papers

Simultaneous computation of discrete Radon transform quadrants for efficient implementation on real time systems / May 2019

Ricardo Oliva, Óscar Gómez, David Carmona, José G. Marichal, José M Rodríguez-Ramos

Discrete Radon transform is a technique that allows to detect lines in images. It is much lighter to compute than Radon transforms based on Fourier slice theorem that use FFT as basis computing block. Even then, it is not that prone to optimal fine grain parallelization due to the need of running 4 passes to mirrored and flipped versions of the input…

Papers

Calibration method applied to a tunable tensor display system / May 2019

David Carmona, Viana L. Guadalupe, Juan Manuel Trujillo, Sergio Bonaque, Ricardo Oliva, Jose G. Marichal, Miguel J. Sicilia, Lara Díaz, José Manuel Rodríguez-Ramos

We present our latest advances in the design and implementation of a tunable automultiscopic display based on the tensor display model. A design comprising a three-layer display was introduced. In such design, front and rear layers were enabled to be controlled in a six-degree of freedom manner related to the central layer of the system.

Papers

Wave Front Phase Imaging of Wafer Warpage : Advanced new metrology technique for blank incoming wafers / May 2019

José Manuel Rodríguez-Ramos, Jan Gaudestad, Juan Manuel Trujillo

We present a new wafer metrology technique, Wave Front Phase Imaging (WFPI), for high speed measurement of wafer geometry including shape, flatness, nanotopography and even sub nm features found in roughness. WFPI acquires data of the entire wafer using a single image snapshot that provides depth data for every single pixel.